Y₂O₃ can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.
Choose your country / language
Global
Americas
-
Argentina
-
Brazil
-
Canada
-
Mexico
-
USA
Europe
-
Austria
-
Belgium
-
Czech Republic
-
Finland
-
France
-
Germany
-
Hungary
-
Italy
-
Luxembourg
-
Netherlands
-
Poland
-
Portugal
-
Romania
-
Slovakia
-
Sweden
-
Turkey
-
United Kingdom
Asia
-
China
-
India
-
Indonesia
-
Japan
-
Korea
-
Malaysia
-
Philippines
-
Singapore
-
Vietnam
Semiconductor showerheads
| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Beläggningshårdhet HIT [GPa] | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
© Copyright 2025 OC Oerlikon Management AG
Tillbaka till början keyboard_arrow_up