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Skiktalternativ Beläggningsmaterial Beläggningsteknik Mikrohårdhet HIT (GPa) Friktionskoefficient (torr) vs. stål Max. driftstemp. [°C] Processtemperatur
BALINIT DYLYN a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 350 < 220
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Semiconductor showerheads

Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.