| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Mikrohårdhet HIT (GPa) | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur | ||
|---|---|---|---|---|---|---|---|---|
| BALINIT DYLYN | a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
|
Semiconductor showerheads
Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.