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Semiconductor wafer chucks and pedestals

Semiconductor wafer chucks and pedestals

Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y₂O₃ for etch-resistance, as well as TiN and CrN for wear and electrical conductivity

Skiktalternativ Beläggningsmaterial Beläggningsteknik Beläggningshårdhet HIT [GPa] Friktionskoefficient (torr) vs. stål Max. driftstemp. [°C] Processtemperatur [°C]
a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 350 < 220
ladda ner
TiN Arc 30 +/- 3 ~0.6 600 < 500

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