Y₂O₃ can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.
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Semiconductor showerheads
| Solution | Coating material | Coating technology | Coating hardness HIT [GPa] | Coefficient of friction (dry) vs. steel | Max. service temp. [°C] | Process temperature [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
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