BALINIT FUTURA NANO generally protects vacuum screw pumps against wear. Y₂O₃ has proven etch-resistance to fluorinated chemistries and enhances component service lifetimes.
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Vacuum screw pumps
| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Beläggningshårdhet HIT [GPa] | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur [°C] | |
|---|---|---|---|---|---|---|---|
| TiAlN | Arc | 33 +/- 3 | ~0.6 | 900 | 500 |
|
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