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Semiconductor showerheads

Y₂O₃ can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.

Solution Coating material Coating technology Coating hardness HIT [GPa] Coefficient of friction (dry) vs. steel Max. service temp. [°C] Process temperature [°C]
a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 300 < 220
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