Y₂O₃ can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.
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Semiconductor showerheads
| Solução | Material de revestimento | Tecnologia de Revestimento | Dureza revestimento HIT [GPa] | Coeficiente de atrito (a seco) em comparação com aço | Temp. máx. de operação [°C] | Temperatura de processo [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
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