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Semiconductor wafer, chucks and pedestals

Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y2O3 for etch-resistance, as well as TiN and CrN for wear and electrical conductivity

Řešení Povlakový materiál Technologie povlakování Tvrdost povlaku HIT [GPa] Součinitel tření (za sucha) vs. ocel Max. provozní teplota [°C] Teplota procesu [°C]
a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 350 < 220
stáhnout
TiN Arc 30 +/- 3 ~0,6 600 < 500

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