Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include YOF for etch-resistance, as well as TiN and CrN for wear and electrical conductivity
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Semiconductor wafer chucks and pedestals
| Solução | Material de revestimento | Tecnologia de Revestimento | Dureza revestimento HIT [GPa] | Coeficiente de atrito (a seco) em comparação com aço | Temp. máx. de operação [°C] | Temperatura de processo [°C] | |
|---|---|---|---|---|---|---|---|
| TiN | Arc | 30 +/- 3 | ~0,6 | 600 | < 500 |
|
|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 | ||
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |
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