Choose your country / language

Semiconductor wafer chucks and pedestals

Semiconductor wafer chucks and pedestals

Semiconductor wafer chucks and pedestals

Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y₂O₃ for etch-resistance, as well as TiN and CrN for wear and electrical conductivity

Tip acoperire Materialul acoperirii Tehnologia de acoperire Duritate acoperire HIT [GPa] Coeficient de frecare (mediu uscat) vs. oțel Temp. max. de operare [°C] Temperatura de proces [°C]
a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 350 < 220
descărcare
TiN Arc 30 +/- 3 ~0,6 600 < 500

© Copyright 2025 OC Oerlikon Management AG

Back to top keyboard_arrow_up

keyboard_arrow_up