Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y₂O₃ for etch-resistance, as well as TiN and CrN for wear and electrical conductivity
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Semiconductor wafer chucks and pedestals
| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Beläggningshårdhet HIT [GPa] | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 | ||
| TiN | Arc | 30 +/- 3 | ~0.6 | 600 | < 500 |
|
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