Advanced spray shops and repair facilities serving the wafer fabrication equipment and flat panel display industries face an increasing number of challenges — such as ever higher performance requirements, increased yield requirements, short development cycles and continuous cost pressure within a highly competitive environment.
Increase Performance and Lower Operating Costs
Simultaneously, on the application technology side, a whole spectrum of challenges must be mastered when it comes to electrostatic chucks, chamber components and process kits (shields & rings), ranging from increased flatness requirements, substrate sizes and corrosion resistance to reducing particle erosion and improved chucking / de-chucking performance.
Oerlikon Metco’s high purity powders, coupled with our high-performance plasma systems demonstrate consistent spray behavior providing the highest coating quality:
- High electrical insulation and excellent electrical properties for electrostatic chucks
- Smooth and dense coatings for electrostatic chuck performance
- Excellent anti-corrosion, particle erosion and plasma resistance for chamber components, resulting higher performance and greater yields
- Low porosity, smooth coatings that promote improved plasma etch and erosion resistance resulting in reduced downtime for the customer
Our unique, comprehensive offering — powder, plasma spray guns coupled with superior process expertise and development support — is unmatched in the industry and allows customers to decrease operating costs, increase part life, increase production and productivity yields, thereby, resulting in lower overall cost of ownership.