| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Mikrohårdhet HIT (GPa) | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur | ||
|---|---|---|---|---|---|---|---|---|
| BALINIT DYLYN | a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
|
|
| BALINIT A | TiN | Arc | 30 +/- 3 | ~0.6 | 600 | < 500 |
Semiconductors backend applications
BALINIT DYLYN´s electrical tunability helps exclude unwanted electrostatic discharge (ESD) from finished devices.