YOF provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.
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Etch chamber components
| Skiktalternativ | Beläggningsmaterial | Beläggningsteknik | Beläggningshårdhet HIT [GPa] | Friktionskoefficient (torr) vs. stål | Max. driftstemp. [°C] | Processtemperatur [°C] | |
|---|---|---|---|---|---|---|---|
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |
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