YOF provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.
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Etch chamber components
| Javasolt megoldás | Bevonat anyaga | Bevonatolási technológia | Bevonat keménység HIT [GPa] | Súrlódási együttható acéllal (szárazon) | Max. üzemi hőm. [°C] | Eljárás hőmérséklete | |
|---|---|---|---|---|---|---|---|
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |