Y2O3 provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.
Choose your country / language
Global
Americas
-
Argentina
-
Brazil
-
Canada
-
Mexiko
-
USA
Europe
-
Belgium
-
Czech Republic
-
France
-
Germany
-
Hungary
-
Italy
-
Luxembourg
-
Netherlands
-
Poland
-
Portugal
-
Romania
-
Russia
-
Turkey
-
United Kingdom
Asia
-
China
-
India
-
Indonesia
-
Japan
-
Korea
-
Malaysia
-
Philippines
-
Singapore
Etch chamber components
Please contact our sales team for a recommendation.
Feedback or questions? Get in touch with us!
