Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include YOF for etch-resistance, as well as TiN and CrN for wear and electrical conductivity
Choose your country / language
Global
Americas
-
Argentina
-
Brazil
-
Canada
-
Mexico
-
USA
Europe
-
Austria
-
Belgium
-
Czech Republic
-
Finland
-
France
-
Germany
-
Hungary
-
Italy
-
Luxembourg
-
Netherlands
-
Poland
-
Portugal
-
Romania
-
Slovakia
-
Sweden
-
Turkey
-
United Kingdom
Asia
-
China
-
India
-
Indonesia
-
Japan
-
Korea
-
Malaysia
-
Philippines
-
Singapore
-
Vietnam
Semiconductor wafer chucks and pedestals
| Javasolt megoldás | Bevonat anyaga | Bevonatolási technológia | Bevonat keménység HIT [GPa] | Súrlódási együttható acéllal (szárazon) | Max. üzemi hőm. [°C] | Eljárás hőmérséklete | |
|---|---|---|---|---|---|---|---|
| TiN | Arc | 30 ±3 | ~0,6 | 600 | < 500 |
|
|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 | ||
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |
© Copyright 2026 OC Oerlikon Management AG
Ugrás a lap tetejére keyboard_arrow_up