Y₂O₃ provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.
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Etch chamber components
| Tip acoperire | Materialul acoperirii | Tehnologia de acoperire | Duritate acoperire HIT [GPa] | Coeficient de frecare (mediu uscat) vs. oțel | Temp. max. de operare [°C] | Temperatura de proces [°C] | |
|---|---|---|---|---|---|---|---|
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |
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