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SUCOTEC 高品質 CVD コーティング装置

SUCOTEC 高品質 CVD コーティング装置

SUCOTEC kila、megaおよび gigaシリーズは、エリコンバルザースの新世代の高品質 CVD システムです。世界中で使われているこのシステムは、完全な生産条件下で、優れた性能、柔軟性、信頼性を備え、ナノレイヤー、マルチレイヤー、新開発のコーティングに対応していることを証明しています。

  • 生産性が向上
  • コスト効果が高く、将来の需要に柔軟に対応
  • メンテナンスコストは低く、稼働時間は長く
  • バッチごとに一貫して高品質なコーティング
  • 信頼できる安全性

Standard Equipment

The coating process in all SUCOTEC CVD systems is carried out at pressures of 40 mbar to 800 mbar abs. and temperatures in the range of 700 °C up to 1040 °C. All specified components are industrially proofed and match with highest expectations.
All heated tubings and valves are insulated with prefabricated materials for best efficiency, avoiding of skin irritation.

Typical coatings which can be deposited with the basic configuration: TiN, TiC, TiCN, MT-TiCN

  Precursor
 
Gases: Ar, H2, N2, HCI, CH4, H2S, CO2, CO up to 25 Mass Flow Controller (MFC) possible
Liquids: TiCI4, CH3CN 2 Coriolis

Options

The extensibility of all SUCOTEC systems allows additional gases and precursors which means they are well prepared for future developments and trends. In general, the SUCOTEC systems are extendable to the following options:

  Special coatings* Requirements
 
Nano columnar MT-TiCN, TiSiN, TiSiCN Ar, C2H6, C2H4, SiCl4
α-AI203 , k-AI203 Aluminium generator (ALGE) for temperatures <350°C
TiAlN and TiAlCN (fcc** or mixed fcc/h with high Al content) NH3, Ar, N2 additional gas inlet, gas heating and gas distribution, ALGE
ZrN, ZrCN, ZrBCN, ZrO2, HfN, HfCN Metal chlorinator (MEGE) for temperatures <450°C
Cr2O3, CrCx Internal chlorinator for temperatures in the range of 700 - 1000°C
TiB2, TiBN, MT-TiBCN BCl3, Ar

* Patents: Oerlikon Balzers AG shall not be under any liability to the customer for any claim for breach of patent rights by any person or parties, under any patents of any country, howsoever arising whether such claim is capable of substantiation or not.
** Face-centered cubic crystal structure

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