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S3p –可调节的脉冲增强等离子

Oerlikon Balzers - S3p

S3p 结合了电弧蒸发和溅射技术的优点

  • 过程中不产生液滴,不产生液滴
  • 涂层表面光滑
  • 非常高的涂层密度和硬度
  • 优异的结合力

独特的工艺窗口,在以下方面具有单独的可调节性

  • 脉冲持续时间
  • 脉冲形状
  • 电流密度

为涂层设计开创了前所未有的选择空间。通过S3p,精确实现相应应用的定制化涂层现已成为现实。

电弧蒸发

在电弧蒸发中,高电流中的微小电荷在靶材表面上移动。此时材料立即熔化并且金属蒸气冷凝在工件上。由于该工艺过程具有爆炸性质,并可形成液化金属的液滴,因此可能导致涂层表面粗糙。引入反应气体从而形成化合物

工艺特点:
  • 电离度高
涂层属性:
  • 高密度、高硬度
  • 优异的结合力
  • 不甚平滑,有液滴

溅射

溅射是用高能粒子轰击靶材而使原子从固体靶材上弹出的过程。在薄膜涂层中,这是通过加速朝向固体靶材的氩离子,使其在靶材上击出金属原子并聚集在工件上来实现的。通过在真空腔室中引入气体而形成如金属氮化物等化合物。

工艺特点:
  • 电离度低
涂层属性:
  • 低密度、低硬度
  • 结合力一般
  • 平滑表面

载入史册的涂层。

已达到技术上的里程碑:BALIQTM ——欧瑞康巴尔查斯新一代涂层。

它基于我们的 S3p 技术(可调节的脉冲增强等离子),智能结合了电弧蒸发和溅射技术的优点。

其结果就是BALIQTM一种具有革新性属性、可用在独特应用范围中的全新耐磨涂层系列。您将受益于前所未有的新的可能性——根据您的需求量身定制的涂层。

BALIQ: the journey of wear-resistant coatings tailored to your needs

Features

  • Precision
    Precision

    The high precision in coating thickness distribution guarantees a high precision of the cutting edges. Outstanding results are achieved especially with tools that have ultra-small diameters.

  • Scalability
    Scalability

    Precise and independent scalability of pulse duration, -shape and unique power scalability within S3p enables tailored coatings. The limits of conventional HiPIMS are overcome with the unique process window as well as significantly higher deposition rates and process stability.

     
     
  • Smoothness
    Smoothness

    The revolutionary smooth surface and the low defects of S3p based coatings enable smooth chip evacuation. A mechanical post-treatment is not needed. Adhesion of workpiece material especially for difficult to machine materials and build-up edges are avoided even with difficult-to-machine materials.

  • Coating Design
    Coating Design

    A large variety of different coating materials can be used with S3p technology. This enables a high number of different application specific coating solutions.

  • Adhesion
    Adhesion

    S3p based coatings stand out by a very good coating-substrate bonding. High adhesion – at least as high as with coatings deposited by Arc Evaporation - guarantees long and reproducible tool life times.

  • Hardness
    Hardness

    Arc as well as S3p based coatings show a high coating hardness, which result in a high abrasive wear resistance of the coatings.

  • Density
    Density

    The coating density of S3p based coatings approaches bulk density. DC-sputter coatings show a more open columnar structure, with its disadvantage of lower toughness and less resistance to crack propagation and diffusion.

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