Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y₂O₃ for etch-resistance, as well as TiN and CrN for wear and electrical conductivity
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Semiconductor wafer chucks and pedestals
| Solution | Coating material | Coating technology | Coating hardness HIT [GPa] | Coefficient of friction (dry) vs. steel | Max. service temp. [°C] | Process temperature [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 | ||
| TiN | Arc | 30 +/- 3 | ~0.6 | 600 | < 500 |
|
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