PVD based processes The PVD processes
What is PVD coating?PVD stands for Physical Vapour Deposition. It is a process carried out under high vacuum and, in most cases, at temperatures between 150 and 500 °C.
How does the PVD process work?
In the PVD process the high purity, solid coating material (metals such as titanium, chromium and aluminium) is either evaporated by heat or by bombardment with ions (sputtering). At the same time, a reactive gas (e.g. nitrogen or a gas containing carbon) is added; it forms a compound with the metal vapour which is deposited on the tools or components as a thin, highly adherent coating. A uniform coating thickness is obtained by rotating the parts at a constant speed about several axes.
Coating properties (such as hardness, structure, chemical and temperature resistance, adhesion) can be precisely controlled.
PVD processes include Arc evaporation, Sputtering, Ion plating, and Enhanced sputtering.
As well as the commonly known PVD processes, Oerlikon Balzers also offers several in-house developed processes.
In this process, an arc with a diameter ranging from microns to just a few tenths of a micron, is run over …
In all PVD processes, the parts in the vacuum chamber to be coated are first heated, and then ion etched by …
Enhanced sputtering employs a low-voltage arc discharge in the centre of the chamber to create a plasma …
Scalable Pulsed Power Plasma
Pulse Enhanced Electron Emission
Under the technology brand ePD™, Oerlikon Balzers develops integrated services, equipment and solutions for …