| Solution | Coating material | Coating technology | Microhardness HIT (GPa) | Coefficient of friction (dry) vs. steel | Max. service temp. [°C] | Process temperature | ||
|---|---|---|---|---|---|---|---|---|
| BALINIT DYLYN | a-C:H:Si | PACVD | ~15-25 | 0.0 5- 0.2 | 300 | < 220 |
|
Semiconductor showerheads
Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.