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Solution Coating material Coating technology Microhardness HIT (GPa) Coefficient of friction (dry) vs. steel Max. service temp. [°C] Process temperature
BALINIT DYLYN a-C:H:Si PACVD ~15-25 0.0 5- 0.2 350 < 220

Semiconductor showerheads

Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.