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Semiconductor showerheads

Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.

Solution Coating material Coating technology Твердость покрытия, Гпа Coefficient of friction (dry) vs. steel Max. service temp. [°C] Температура процесса [°C]
a-C:H:Si PACVD ~ 15-25 0.05 - 0.2 300 < 220

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