The DOMINO pica is a small, compact PVD system and is designed for fast, short processes. It is used in particular for coating small parts from different industries running small batches up to a few 100 tools and still impresses with its flexible technological options.
- Fast and short batch times of 2-4 hours
- APA Arc, HiPIMS sputtering or hybrid technology
- Combination also with PACVD and nitriding process
- Small, compact system for PVD startups with a turnkey concept from Oerlikon Balzers
| Properties | DOMINO pica |
|---|---|
| Equipment type | compact (1 chamber door) |
| Usable coating volume | Ø 330 mm x 300 mm |
| Available coating modules | Arc, Sputter, HiPIMS, Hybrid, Nitriding |
| APA arc evaporators | 2 to 6 |
| Magnetron sputter sources | 1 to 3 |
| Available power supplies | DC, DC pulse, middle frequency (MF), HiPIMS, (RF upon request) |
| Available BIAS | Bipolar pulse, middle frequency |
| Plasma cleaning | All systems equipped with patented power etching process AEGD |
| Standard substrate table (others upon request) |
5 shafts |