Chip production also exposes equipment to extreme conditions: aggressive chemicals, plasmas, high heat and tiny structures only a few micrometers in size. Under these conditions, uncoated metals and even standard coatings can corrode, erode or release particles. Oerlikon therefore offers BALINIT DYLYN, BALINIT DLC and thermal spray coatings developed for these demanding environments.
These different coatings technologies protect components such as chamber liners, focus rings, electrostatic chucks and wafer handling systems. They reduce defect rates, extend maintenance intervals and lower costs in a sector where every percentage point of yield matters.
With its coatings and additive manufacturing expertise, Oerlikon helps the semiconductor industry increase stability, improve performance and keep pushing digital innovation forward.