The DOMINO mega flex is designed for customers who require significantly higher coating capacity while maintaining the flexibility of the DOMINO platform. Its freely accessible two-door chamber concept improves ergonomics and accessibility while providing an ideal platform for automation and advanced coating processes. At the same time, the system offers flexible installation and equipment layouts, allowing it to be integrated efficiently into existing production facilities while remaining adaptable to changing requirements.
- APA Arc, HiPIMS sputtering or hybrid technology on up to 6 flanges
- New etching technology ADVANCED AEGD
- Double-walled, water-cooled stainless steel chamber accessible from both sides with 2 chamber doors
- Automatic opening and closing of loading door for automation process
- Precursors for various PACVD processes, also in combination with a nitriding process
- Retrofitting of various technologies and analysis systems (plasma) depending on customer requirements
- The system consists of two modules that can be positioned flexibly
| Properties | DOMINO giga flex |
|---|---|
| Equipment type | flex (2 chamber doors) |
| Usable coating volume | Ø 1,025 mm x 1,100 mm |
| Available coating modules | Arc, Sputter, HiPIMS, Hybrid, Nitriding |
| APA arc evaporators | 6 to 36 |
| Magnetron sputter sources | 1 to 6 |
| Available power supplies | DC, DC pulse, middle frequency (MF), HiPIMS |
| Available BIAS | Bipolar pulse, middle frequency |
| Plasma cleaning | All systems equipped with patented power etching process AEGD |
| Standard substrate table (others upon request) |
18 shafts |