Y₂O₃ provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.
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Etch chamber components
| Solution | Coating material | Coating technology | Coating hardness HIT [GPa] | Coefficient of friction (dry) vs. steel | Max. service temp. [°C] | Process temperature [°C] | |
|---|---|---|---|---|---|---|---|
| YOF | Magnetron PVD | ~ 12 | ~ 0.6 | > 1000 | < 250 |
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