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SUCOTEC

SUCOTEC High-quality CVD coating equipment

SUCOTEC Equipment

The SUCOTEC kila, mega and giga series are the new generation of high-quality CVD systems from Oerlikon Balzers. In use around the world, these systems have proven their outstanding performance, flexibility and reliability for nanolayers, multilayers and newly developed coatings in full production conditions.

  • Increased productivity
  • Cost-effective and flexible for future demands
  • Low maintenance costs and more uptime
  • Consistently high quality of coatings – batch by batch
  • Safety you can rely on

Standard Equipment

The coating process in all SUCOTEC CVD systems is carried out at pressures of 40 mbar to 800 mbar abs. and temperatures in the range of 700 °C up to 1040 °C. All specified components are industrially proofed and match with highest expectations.
All heated tubings and valves are insulated with prefabricated materials for best efficiency, avoiding of skin irritation.

Typical coatings which can be deposited with the basic configuration: TiN, TiC, TiCN, MT-TiCN

  Precursor
 
Gases: Ar, H2, N2, HCI, CH4, H2S, CO2, CO up to 25 Mass Flow Controller (MFC) possible
Liquids: TiCI4, CH3CN 2 Coriolis

Options

The extensibility of all SUCOTEC systems allows additional gases and precursors which means they are well prepared for future developments and trends. In general, the SUCOTEC systems are extendable to the following options:

  Special coatings* Requirements
 
Nano columnar MT-TiCN, TiSiN, TiSiCN Ar, C2H6, C2H4, SiCl4
α-AI203 , k-AI203 Aluminium generator (ALGE) for temperatures <350°C
TiAlN and TiAlCN (fcc** or mixed fcc/h with high Al content) NH3, Ar, N2 additional gas inlet, gas heating and gas distribution, ALGE
ZrN, ZrCN, ZrBCN, ZrO2, HfN, HfCN Metal chlorinator (MEGE) for temperatures <450°C
Cr2O3, CrCx Internal chlorinator for temperatures in the range of 700 - 1000°C
TiB2, TiBN, MT-TiBCN BCl3, Ar

* Patents: Oerlikon Balzers AG shall not be under any liability to the customer for any claim for breach of patent rights by any person or parties, under any patents of any country, howsoever arising whether such claim is capable of substantiation or not.
** Face-centered cubic crystal structure

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