Semiconductor and Flat Panel Display Fabrication

Advanced spray shops and repair facilities serving the wafer fabrication equipment and flat panel display industries face an increasing number of challenges — such as ever higher performance requirements, increased yield requirements, short development cycles and continuous cost pressure within a highly competitive environment.

Increase Performance and Lower Operating Costs

Simultaneously, on the application technology side, a whole spectrum of challenges must be mastered when it comes to electrostatic chucks, chamber components and process kits (shields & rings), ranging from increased flatness requirements, substrate sizes and corrosion resistance to reducing particle erosion and improved chucking / de-chucking performance.

Oerlikon Metco’s high purity powders, coupled with our high-performance plasma systems demonstrate consistent spray behavior providing the highest coating quality:

High electrical insulation and excellent electrical properties for electrostatic chucks
Smooth and dense coatings for electrostatic chuck performance
Excellent anti-corrosion, particle erosion and plasma resistance for chamber components, resulting higher performance and greater yields
Low porosity, smooth coatings that promote improved plasma etch and erosion resistance resulting in reduced downtime for the customer

Our unique, comprehensive offering — powder, plasma spray guns coupled with superior process expertise and development support — is unmatched in the industry and allows customers to decrease operating costs, increase part life, increase production and productivity yields, thereby, resulting in lower overall cost of ownership.