SolarFrom silicon crystal pulling, to the production of solar cells, to the lamination of solar modules – these manufacturing processes are not possible without vacuum. Indifferent if crystalline or thin film coating is concerned - a tailor made vacuum solution is a key factor in photovoltaic production.
The market is driven by modern communication tools like smartphones, tablets, flat panel displays for TV or the Internet of Things. Be it Cluster Tools, Implanters, Etch oder PECVD for Chip production – at Oerlikon Leybold Vacuum you will find the high quality and high reliability vacuum solution for the best performance.
The following Leybold products are suitable among other things for solar applications
- Dry Fore Vacuum Pumps - SCREWLINE
- Dry Fore Vacuum Pumps - DRYVAC
- Dry Fore Vacuum Pumps - LEYVAC
- Roots Vacuum Pumps - RUVAC
- Rotary Vane Vacuum Pumps - SOGEVAC
- Mechanical Turbomolecular Pumps - TURBOVAC
- Magnetic Turbomelecular Pumps - MAG
- Helium Leak Detecting Systems - PHOENIXL
- Forevacuum Pump Systems - RUTA