Equipment with integrated chamber
Compact equipment in different sizes for all production needs.
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Properties |
METAPLAS.DOMINO pica
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METAPLAS.DOMINO micra
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METAPLAS.DOMINO kila
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Usable coating volume |
Ø 330 mm x 300 mm
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Ø 450 mm x 500 mm
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Ø 620 mm x 700 mm
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Available coating modules |
Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C
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APA arc evaporators |
2 to 6
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3 to 12
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4 to 16
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Magnetron sputter sources |
1 to 3
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1 to 4
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1 to 4
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Available power supplies |
DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)
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Plasma cleaning |
All systems equipped with patented power etching process AEGD
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Standard substrate table
(others upon request) |
5 shafts
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6 shafts
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9 shafts
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Equipment with free chamber and two doors
The flex versions are perfectly designed for future integration of newly developed technology as well as for example integration into automated production processes.
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Properties |
METAPLAS.DOMINO kila flex
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METAPLAS.DOMINO giga flex
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Usable coating volume |
Ø 620 mm x 700 mm
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Ø 1,200 mm x 1,500 mm
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Available coating modules |
Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C
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APA arc evaporators |
4 to 16
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8 to 32
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Magnetron sputter sources |
1 to 6
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1 to 4
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Available power supplies |
DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)
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Plasma cleaning |
All systems equipped with patented power etching process AEGD
|
Standard substrate table
(others upon request) |
9 shafts
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Up to 32 shafts
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