METAPLAS.DOMINOOne technology platform – various possibilities
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Tailoring multiple modules to individual demands and building a great unit – this is the basis of the METAPLAS.DOMINO. State-of-the-art thin film equipment has been developed with the knowledge of nearly 30 years of experience in tool manufacturing industry.
For Oerlikon Balzers, this means offering efficient system solutions and even setting trends in surface treatment. The modular and flexible concept of the thin film equipment allows further expansions and upgrades.
- High process reliability
- Short cycle times
- Low costs per piece
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Avantajları
Avantajları
- Flexibility, various modular expansion options
- Indiviually tailored coatings
- Minimised maintenance and demand of spare parts
- Efficient after-sales service
HI3 – High Ionization Triple
Hybrid Technology (Arc+HiPIMS) combined with AEGD plasma etching:
- Combined strength of 3 processes in one PVD system
- Excellent adhesion, high deposition rate, smooth coatings, economic production
- Innovative approach to the next generation of PVD coatings for various applications
- HI3 technology allows to achieve a variety of layer architectures
- With HI3 technology coatings can be tailored by a wide range of materials, by micro alloying, by doping and by design of layer architecture ... combined with economical production!
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Özellikleri
Equipment with integrated chamber
Compact equipment in different sizes for all production needs.
Properties METAPLAS.DOMINO picaMETAPLAS.DOMINO micraMETAPLAS.DOMINO kilaUsable coating volume Ø 330 mm x 300 mmØ 450 mm x 500 mmØ 620 mm x 700 mmAvailable coating modules Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-CAPA arc evaporators 2 to 63 to 124 to 16Magnetron sputter sources 1 to 31 to 41 to 4Available power supplies DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)Plasma cleaning All systems equipped with patented power etching process AEGDStandard substrate table
(others upon request)5 shafts6 shafts9 shafts
Equipment with free chamber and two doors
The flex versions are perfectly designed for future integration of newly developed technology as well as for example integration into automated production processes.
Properties METAPLAS.DOMINO kila flexMETAPLAS.DOMINO giga flexUsable coating volume Ø 620 mm x 700 mmØ 1,200 mm x 1,500 mmAvailable coating modules Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-CAPA arc evaporators 4 to 168 to 32Magnetron sputter sources 1 to 61 to 4Available power supplies DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)Plasma cleaning All systems equipped with patented power etching process AEGDStandard substrate table
(others upon request)9 shaftsUp to 32 shafts -
Daha fazla bilgi
Daha fazla bilgi
Main modules
Arc
The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures.
Benefits:
- High target utilisation result in low target costs
- High deposition rates
- Adjustable magnetic fields
- Short target changing times
- High plasma density
- Reduction of macro-particles
- Excellent coating adhesion
HiPIMS
HiPIMS stands for High-Power Impulse Magnetron Sputtering.
Benefits:
- High ionisation rate (similar to arc)
- High power densities from 100 to 1000 W/cm2
- Very high plasma density
- Layer structures adjustable by plasma parameter settings
- Very smooth coatings
- Excellent coating adhesion
- Deposition of dense coatings at low substrate temperatures
Additional modules
Sputter
In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate.
Benefits:
- A wide range of materials can be sputtered
- Diverse process variants available
- Smooth coatings
- Good coating adhesion on combination with power etching prozess AEGD
Nitriding
With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating.
Benefits:
- Optimisation of tool and component properties
- Substitution of expensive base materials
- Significantly longer lifetimes
- All PVD coatings can be applied
DLC
DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings.
Benefits:
- Excellent coating adhesion
- High wear resistance
- Low coefficient of friction
- Smooth coatings
ta-C
ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced.
Benefits:
- For higher temperature environments than DLC
- Very high wear resistance
- Excellent coating adhesion
- Smooth coatings