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METAPLAS DOMINO pica
METAPLAS DOMINO micra
METAPLAS DOMINO kila
METAPLAS DOMINO kila flex
METAPLAS DOMINO giga flex

Tailoring multiple modules to individual demands and building a great unit – this is the basis of the METAPLAS.DOMINO. State-of-the-art thin film equipment has been developed with the knowledge of nearly 30 years of experience in tool manufacturing industry.

For Oerlikon Balzers, this means offering efficient system solutions and even setting trends in surface treatment. The modular and flexible concept of the thin film equipment allows further expansions and upgrades.

  • High process reliability
  • Short cycle times
  • Low costs per piece

 Equipment with integrated chamber

Compact equipment in different sizes for all production needs.

Properties

METAPLAS.DOMINO pica

Usable coating volume

Ø 330 mm x 300 mm

Available coating modules

Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C

APA arc evaporators

2 to 6

Magnetron sputter sources

1 to 3

Available power supplies

DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)

Plasma cleaning

All systems equipped with patented power etching process AEGD

Standard substrate table
(others upon request)

5 shafts

Properties

METAPLAS.DOMINO micra

Usable coating volume

Ø 450 mm x 500 mm

Available coating modules

Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C

APA arc evaporators

3 to 12

Magnetron sputter sources

1 to 4

Available power supplies

DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)

Plasma cleaning

All systems equipped with patented power etching process AEGD

Standard substrate table
(others upon request)

6 shafts

Properties

METAPLAS.DOMINO kila

Usable coating volume

Ø 620 mm x 700 mm

Available coating modules

Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C

APA arc evaporators

4 to 16

Magnetron sputter sources

1 to 4

Available power supplies

DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)

Plasma cleaning

All systems equipped with patented power etching process AEGD

Standard substrate table
(others upon request)

9 shafts

 Equipment with free chamber and two doors

The flex versions are perfectly designed for future integration of newly developed technology as well as for example integration into automated production processes.

Properties

METAPLAS.DOMINO kila flex

Usable coating volume

Ø 620 mm x 700 mm

Available coating modules

Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C

APA arc evaporators

4 to 16

Magnetron sputter sources

1 to 6

Available power supplies

DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)

Plasma cleaning

All systems equipped with patented power etching process AEGD

Standard substrate table
(others upon request)

9 shafts

Properties

METAPLAS.DOMINO giga flex

Usable coating volume

Ø 1,200 mm x 1,500 mm

Available coating modules

Arc, Sputter, HiPIMS, HI3, Nitriding, DLC, ta-C

APA arc evaporators

8 to 32

Magnetron sputter sources

1 to 4

Available power supplies

DC, DC pulse, HiPIMS, bipolar pulsed, MF (RF upon request)

Plasma cleaning

All systems equipped with patented power etching process AEGD

Standard substrate table
(others upon request)

Up to 32 shafts

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