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METAPLAS.DOMINO pica

The METAPLAS.DOMINO pica is a small, compact PVD system and is designed for fast, short processes. It is used in particular for coating small parts from different industries running small batches up to a few 100 tools and still impresses with its flexible technological options.

  • Fast and short batch times of 2-4 hours
  • APA Arc, HiPIMS sputtering or HI3 technology
  • Combination also with PACVD and nitriding process
  • Small, compact system for PVD startups with a turnkey concept from Oerlikon Balzers
     

Equipment with integrated chamber

Compact equipment in different sizes for all production needs.

Properties METAPLAS.DOMINO pica
Usable coating volume Ø 330 mm x 300 mm
Available coating modules Arc, Sputter, HiPIMS, HI3, Nitriding
APA arc evaporators 2 to 6
Magnetron sputter sources 1 to 3
Available power supplies DC, DC pulse, middle frequency (MF), HiPIMS, (RF upon request)
Available BIAS Bipolar pulse, middle frequency
Plasma cleaning All systems equipped with patented power etching process AEGD
Standard substrate table
(others upon request)
5 shafts

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