Products include BALINIT DYLYN for wear and contamination reduction and tunable electrical properties. Others include Y₂O₃ for etch-resistance, as well as TiN and CrN for wear and electrical conductivity
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Semiconductor wafer chucks and pedestals
| Javasolt megoldás | Bevonat anyaga | Bevonatolási technológia | Bevonat keménység HIT [GPa] | Súrlódási együttható acéllal (szárazon) | Max. üzemi hőm. [°C] | Eljárás hőmérséklete | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 | ||
| TiN | Arc | 30 ±3 | ~0,6 | 600 | < 500 |
|
