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METAPLAS DOMINO pica
METAPLAS DOMINO micra
METAPLAS DOMINO kila
METAPLAS DOMINO kila flex
METAPLAS DOMINO giga flex

Tailoring multiple modules to individual demands and building a great unit – this is the basis of the METAPLAS.DOMINO. State-of-the-art thin film equipment has been developed with the knowledge of nearly 30 years of experience in tool manufacturing industry.

For Oerlikon Balzers, this means offering efficient system solutions and even setting trends in surface treatment. The modular and flexible concept of the thin film equipment allows further expansions and upgrades.

  • High process reliability
  • Short cycle times
  • Low costs per piece

Main modules

Arc

The innovative APA evaporator technology (Advanced Plasma Assisted) is based on cathodic vacuum arc and offers diverse development possibilities for new layer architectures.

Benefits:
  • High target utilisation result in low target costs
  • High deposition rates
  • Adjustable magnetic fields
  • Short target changing times
  • High plasma density
  • Reduction of macro-particles
  • Excellent coating adhesion

HiPIMS

HiPIMS stands for High-Power Impulse Magnetron Sputtering.

Benefits:
  • High ionisation rate (similar to arc)
  • High power densities from 100 to 1000 W/cm2
  • Very high plasma density
  • Layer structures adjustable by plasma parameter settings
  • Very smooth coatings
  • Excellent coating adhesion
  • Deposition of dense coatings at low substrate temperatures

Additional modules

Sputter

In the sputtering process, atoms are extracted from a target by bombardment with high-energy ions (Ar) and transformed into the gas phase. By combining the sputtered material with additional gases, a coating is deposited on the substrate.

Benefits:
  • A wide range of materials can be sputtered
  • Diverse process variants available
  • Smooth coatings
  • Good coating adhesion on combination with power etching prozess AEGD

Nitriding

With the nitriding module, a plasma nitriding process can be performed before a PVD and/or PACVD coating process in one system and one batch. Thereby a hardened layer can be produced which offers excellent support for the subsequent PVD/PACVD coating.

Benefits:
  • Optimisation of tool and component properties
  • Substitution of expensive base materials
  • Significantly longer lifetimes
  • All PVD coatings can be applied

DLC

DLC stands for Diamond-Like Carbon and refers to a group of extremely low friction amorphous carbon coatings. With the DLC module, different DLC coatings can be produced by using PVD and/or PACVD processes. Standard DLC coatings consist of metal free or metal containing carbon coatings.

Benefits:
  • Excellent coating adhesion
  • High wear resistance
  • Low coefficient of friction
  • Smooth coatings

ta-C

ta-C stands for tetrahedral amorphous carbon without hydrogen and refers to a group of extremely hard and low friction amorphous carbon coatings. With the ta-C module different ta-C coatings can be produced.

Benefits:
  • For higher temperature environments than DLC
  • Very high wear resistance
  • Excellent coating adhesion
  • Smooth coatings

Feedback or questions? Get in touch with us!

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