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Équipement de revêtement CVD de qualité SUCOTEC

Les séries kila, mega et giga de SUCOTEC constituent la nouvelle génération de systèmes CVD haut de gamme d'Oerlikon Balzers. Utilisés dans le monde entier, ces systèmes ont démontré leur précision, leur niveau remarquable de performance, de flexibilité et de fiabilité pour les nanocouches, les multicouches et les nouveaux revêtements développés dans des parfaites conditions de production.

  • Productivité améliorée
  • Rentable et flexible pour répondre aux exigences de demain
  • Faible coût d'entretien et disponibilité accrue
  • Qualité élevée et constante des revêtements - lot après lot
  • Fiabilité et sécurité

Standard Equipment

The coating process in all SUCOTEC CVD systems is carried out at pressures of 40 mbar to 800 mbar abs. and temperatures in the range of 700 °C up to 1040 °C. All specified components are industrially proofed and match with highest expectations.
All heated tubings and valves are insulated with prefabricated materials for best efficiency, avoiding of skin irritation.

Typical coatings which can be deposited with the basic configuration: TiN, TiC, TiCN, MT-TiCN

  Precursor
 
Gases: Ar, H2, N2, HCI, CH4, H2S, CO2, CO up to 25 Mass Flow Controller (MFC) possible
Liquids: TiCI4, CH3CN 2 Coriolis

Options

The extensibility of all SUCOTEC systems allows additional gases and precursors which means they are well prepared for future developments and trends. In general, the SUCOTEC systems are extendable to the following options:

  Special coatings* Requirements
 
Nano columnar MT-TiCN, TiSiN, TiSiCN Ar, C2H6, C2H4, SiCl4
α-AI203 , k-AI203 Aluminium generator (ALGE) for temperatures <350°C
TiAlN and TiAlCN (fcc** or mixed fcc/h with high Al content) NH3, Ar, N2 additional gas inlet, gas heating and gas distribution, ALGE
ZrN, ZrCN, ZrBCN, ZrO2, HfN, HfCN Metal chlorinator (MEGE) for temperatures <450°C
Cr2O3, CrCx Internal chlorinator for temperatures in the range of 700 - 1000°C
TiB2, TiBN, MT-TiBCN BCl3, Ar

* Patents: Oerlikon Balzers AG shall not be under any liability to the customer for any claim for breach of patent rights by any person or parties, under any patents of any country, howsoever arising whether such claim is capable of substantiation or not.
** Face-centered cubic crystal structure

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