BALORA® HALONA is a PVD coating engineered for high-demand plasma etching, offering exceptional chemical and abrasion resistance - meeting current and future semiconductor needs.
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BALORA HALONA Superior Corrosion Protection for Long-Lasting Semiconductor Performance
| BALORA HALONA | |
|---|---|
| Coating material | YOF |
| Coating technology | Magnetron PVD |
| Coating colour | clear |
| Coating hardness HIT [GPa]* | ~ 12 |
| Coefficient of friction (dry) vs. steel** | ~ 0.6 |
| Max. service temp. [°C]**** | > 1000 |
| Process temperature [°C] | < 250 |
| General remark | All given data are approximate values, they depend on application, environment and test condition. |
| *Coating hardness HIT [GPa] | Measured by nano indentation according to ISO 14577. For multilayers the hardness of the different layers varies. Hardness can be adapted to the application. |
| **Coefficient of friction (dry) vs. steel | Determined by ball-on-disc test in dry condition with an Steel ball according to ASTM G99. During run-in the given values may be exceeded. |
| ****Max. service temp. [°C] | These are approximate values out of the field. Due to thermodynamic laws there is a dependency of pressure in application. |
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