Y2O3 can reduce unwanted AlF particle generation and contamination. BALINIT DYLYN can even match emissivity in certain applications.
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Semiconductor showerheads
| Erantzuna | Estaldura materiala | Estaldura teknologia | Estalduraren gogortasuna HIT [GPa] | Marruskadura koefizientea (lehorra) altzairuaren aldean | Zerbitzuren denb. max. [ºC] | Prozesuaren tenperatura [°C] | |
|---|---|---|---|---|---|---|---|
| a-C:H:Si | PACVD | ~ 15-25 | 0.05 - 0.2 | 350 | < 220 |
Iruzkin edo galderarik? Jarri gurekin harremanetan!
