Please select your suitable product

Please contact our sales team for a recommendation.


Etch chamber components

Y2O3 provides excellent corrosion resistance to fluorinated chemistries. Benefits include lower CoO and low metallic contamination.

Welcome to our website!

Oerlikon Balzers is in the process of redesigning its websites to improve the visitor experience.
May we have a few minutes of your valuable time to participate in our survey?

We would be grateful for your opinion!

Start the survey Remind me later No thanks