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Solar Dry compressing vacuum pumps and systems for coating applications in the solar industry

Pump System for Solar Coating System KAI 1200

  • Loadlock pump set:
    Pumping speed: 1000 m3/h
    Ultimate pressure: < 10-3 mbar
  • Transfer module pump set:
    Pumping speed: 6000 m3/h
    Ultimate pressure: < 10-3 mbar
  • Process module pump set:
    Pumping speed: 6000 m3/h
    Ultimate pressure: < 10-3 mbar

Applications from the area of thin-film technology

  • Manufacture of silicon thin-film modules
  • Manufacture of photo-voltaic modules in PECVD processes