Oerlikon Balzers

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Ion plating

Ion plating is a PVD process that uses reactive electron beam evaporation. While sputtering uses bombardment with argon ions to remove coating material from a metal plate, in ion plating, the metallic component of the coating material (e.g. titanium or chromium) is evaporated by a low-voltage arc.

  1. Electron beam source
  2. Argon
  3. Reactive gas
  4. Components
  5. Coating material
  6. Crucible (anode)
  7. Low-voltage arc discharge
  8. Vacuum pump
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Vinzens Dosch
T: +423 388 7500
F: +423 388 5419
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OC Oerlikon Balzers AG
Iramali 18
9496 Balzers
Liechtenstein
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