PACVD PACVD = Plasma-Assisted Chemical Vapour Deposition
To produce metal-free carbon coatings, Oerlikon Balzers Coating uses the high-frequency PACVD process.
The setup used in this process is similar to that for sputtering. But after sputtering a metallic adhesion film, a high-frequency AC voltage is applied.
On introducing a gas containing the coating elements, a gas discharge occurs in the process chamber. Thiscreates carbon and hydrogen atoms (ions and radicals) that form a dense coating on the tools and components. Varying the applied voltage influences the coating properties.
- Reactive gas
- Plasma sheath
- High-frequency connection
- Vacuum pump