PACVD PACVD = Plasma-Assisted Chemical Vapour Deposition

To produce metal-free carbon coatings, Oerlikon Balzers Coating uses the high-frequency PACVD process.

The setup used in this process is similar to that for sputtering. But after sputtering a metallic adhesion film, a high-frequency AC voltage is applied.

On introducing a gas containing the coating elements, a gas discharge occurs in the process chamber. Thiscreates carbon and hydrogen atoms (ions and radicals) that form a dense coating on the tools and components. Varying the applied voltage influences the coating properties.

  1. Argon
  2. Reactive gas
  3. Components
  4. Plasma sheath
  5. High-frequency connection
  6. Vacuum pump