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Oerlikon Balzers Coating AG
Balzers Technology & Service Centre
Iramali 18
9496 Balzers

Arc evaporation

Arc evaporation In this process, an arc with a diameter ranging from microns to just a few tenths of a micron, is run over the solid, metallic coating material, causing it to evaporate. The high currents and power densities used cause almost complete ionization of the evaporated material and, thereby, the formation of a high-energy plasma.

The metal ions combine with a reactive gas that is introduced into the chamber, strike the target tools or components with high energy and are deposited as a thin and highly adherent coating.

  1. 1. Argon
  2. 2. Reactive gas
  3. 3. Arc Sources (coating material and backing plate)
  4. 4. Components
  5. 5. Vacuum pump