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Oerlikon Balzers Coating AG
Balzers Technology & Service Centre
Iramali 18
9496 Balzers

PACVD Plasma-assisted Chemical Vapour Deposition

PACVD Oerlikon Balzers produces metal-free carbon coatings using the high-frequency PACVD process.

The set-up for this process is similar to that for sputtering, which is frequently used in combination with CVD. In PACVD a gas containing the coating elements is introduced into the vacuum chamber and a discharge powered by an AC voltage is ignited.

This creates free carbon and hydrogen atoms (ions and radicals) that form a dense coating on the tools and components. Coating properties can be influenced by varying the applied voltage.

  1. 1. Argon
  2. 2. Reactive gas
  3. 3. Components
  4. 4. Plasma sheath
  5. 5. High-frequency connection
  6. 6. Vacuum pump